The ALD7 ultrahigh-purity (UHP) diaphragm valve can deliver the consistency and long service life necessary for semiconductor fabricators to improve chip yields. It provides dosing precision, fast actuation, and consistent performance over tens of millions of production cycles.
ALD7 valves can be integrated into either new tools or legacy equipment to provide improved flow capacity in the same 1.5 in. (38.1 mm) footprint as existing valves. The actuator’s open and close response time can be less than 5ms. The actuator is immersible to 302°F (150°C) and the valve body is rated to 392°F (200°C), allowing the valve to better support low-vapor-pressure precursors that require high temperature delivery.
ALD7 valves feature a compact design with an integrated thermal isolator, allowing system designers to maximize limited space near the reaction chamber of chip production tools. The valves are also highly resistant to corrosive gases used in ALD processes, with valve bodies comprised of proprietary ultrahigh-purity Swagelok 316L VIM-VAR stainless steel.
- Working pressure: Vacuum to 145 psig (10.0 bar)
- Burst pressure: >3200 psig (220 bar)
- Actuation pressure: 60 to 120 psig (4.1 to 8.27 bar)
- Temperature rating:
- Valve body from 32°F (0°C) to 392°F (200°C)
- Actuator from 32°F (0°C) to 302°F (150°C)
- Flow coefficient: 0.7 Cv
- Body materials: 316L VIM-VAR stainless steel
- Diaphragm material: Cobalt-based superalloy
