The ServoBelt Arc Drive features custom designed rotary and tilt axes that position semiconductor glass panels. Measuring 17.7 in. (450 mm) across, the robot’s large rotary axis is built around a ServoBelt drive mechanism and a Bell-Everman bearing design. The large-diameter rotary stage on the robot can be scaled to larger sizes and is available as a separate product. The tilt axis, which moves the entire rotary stage assembly and its payload up to 90 degrees, is driven by an arc-shaped ServoBelt drive mechanism, which can also be scaled and applied to other tilt applications.
The stage offers
- Torque rating of 200 N-m (400 N-m ultimate)
- Speeds up to 150 rpm
- Repeatability to ±22 µrad (0.001º)
