SMART-Essentials Create More Efficient Helium Leak Detection for Semiconductor Manufacturing

Leak tests are essential in semiconductor factories and in the manufacturing of solar cells and flat panel displays. Identifying the smallest leaks with helium leak detection is important for maintaining the required purity, avoiding defects, and ultimately for product quality.

To enhance the UL family of leak testers, INFICON has launched 3 intelligent additions: SMART-Spray, I·BOOST, and SPRAY-Check. They create easier handling, faster response times, shorter test cycles, and more reliable measurement results.

SMART-Spray

The helium spray gun removes the hose-bound handling of large helium cylinders and the error-prone adjustment of spray volume. 

Featuring an illuminated color display, it makes leak detection on complex semiconductor systems with many test points and potential leaks easier. These applications are characterized by limit leak rates of less than 1 x 10-9 mbar x l/s. In these applications, the battery-operated, portable device makes leak testing more flexible, simpler, and more efficient.

SMART-Spray can be operated with either 50 or 405 ml helium cartridges (HeliCan), depending on your preference for accessibility in narrow spaces or for extended use.

When filled to a maximum relative pressure of 6 bar, the 405 ml HeliCan provides over 5,000 sprays of 2 seconds at 12 sccm, while the 50 ml cartridge allows for more than 600 sprays of 2 seconds at 12 sccm. Using larger flows of 70, 250, or 1,100 sccm reduces endurance linearly, enabling integral testing.

I·BOOST

With the signal processing filter I·BOOST software update, the leak rate signal is accelerated, shortening response and test times, especially for the UL3000 Fab and UL6000 Fab series, since the test points can be sprayed at shorter intervals.

SPRAY-Check

With the SPRAY-Check, INFICON offers an easy-to-install test leak. The tool is based on quartz windows that are only permeable to light gases such as helium and hydrogen. This increases safety and extends the functionality of leak detection.

SPRAY-Check allows the measurement set-up and test method to be checked in the relevant leak rate range. It can also be attached directly to the system to carry out dead-time checks. This allows users to better estimate how long the pause between spraying points should last so that potential leaks can be clearly assigned. The exclusion procedure applies: If there is no indication after the dead time has elapsed, there is no leak.

Because SPRAY-Check is impermeable to gases that are harmful to the process, such as water or oxygen, it can also remain mounted on the semiconductor system. Important areas of application are systems with limit leakage rates below 10-9 mbar x l/s.

SMART-Spray, I·BOOST, and SPRAY-Check are suitable for all mobile INFICON helium leak detectors of the UL family, whereby I·BOOST is limited to the latest generation of UL devices (UL3000 Fab/UL6000 Fab series).

The UL6000 Fab is best for larger test volumes in modern semiconductor factories and coating systems with very large chamber volumes. It offers fast response times and short test times in all measuring ranges. Its compact design makes it easy to maneuver even in tight spaces.

The UL3000 Fab series was also developed for leak detection in semiconductor factories. It's flexible, mobile, fast, and highly sensitive. Users also receive precise test results very quickly. The UL3000 Fab also requires only a small footprint and can be easily maneuvered through narrow spaces.

The UL1000 Fab series covers a wide range of applications when it comes to economical helium vacuum leak tests in industrial or semiconductor environments, especially for smaller chamber volumes.

Features:

SMART-Spray

Price: Contact the company for pricing

Downloads

→ SMART-Essentials Spec Sheet