The MarSurf WI White Light Interferometer enables high-resolution 3D measurement and maximum ease of use. The new system features evaluation technology based on artificial intelligence. The system offers a resolution of down to 0.1 nm, making it ideal for use in the production of semiconductor devices or optical components.
The interferometer enables users to improve the manufacturing quality of workpieces with faster throughput and higher accuracy for a wide variety of applications.
The new MarSurf WI also uses the same MfM software interface for measurement and analysis as the existing MarSurf CM line of surface metrology instruments.
- ICA technology: An algorithm specifically designed to ensure the best correlation
- Optimal signal-to-noise ratio: Minimal noise of only 80 pm
- Manual to automated: Three devices for a broad range of applications
- Large positioning volume: Flexible measurement of bulky or clamped components
